SMIC has begun testing its own DUV machine and wants to keep the production process entirely within China.
According to the Financial Times, China’s largest chip manufacturer, Semiconductor Manufacturing International Corporation (SMIC), is testing one of China’s first immersion DUV (deep ultraviolet) lithography machines.
Ready for Production in 2027
The system is a 28-nanometer (nm) DUV lithography machine that can also be used for the production of 7nm or even 5nm chips through multi-patterning techniques. The development is being carried out by Shanghai Yuliangsheng Technology Co, a local start-up that is reportedly connected to Huawei.
The machine consists mainly of Chinese components, but some are still imported. The DUV tools come from the Dutch company ASML, according to Trendforce. The company is trying to keep the entire supply chain within China. This way, it is no longer bound by American or European export regulations. The aim is to start actively producing the machine at SMIC in 2027.
Still some Obstacles to Overcome
Although SMIC claims that 7nm and 5nm chips are possible on this 28nm machine via multi-patterning, experts say that this first requires a significant change in design. Even if the machine can produce 28nm in 2027, it will take years before SMIC can scale up to 16nm and 7nm. Production below 10nm on their own machines therefore seems feasible at the earliest around 2030.