Russia thinks it can design its own lithography machine that is cheaper and simpler than ASML’s machinery. That should lift domestic chip production.
The Russian Institute of Physics of Microsystems (IFM RAN) is laying out a plan to develop its own lithography machine to replace market leader ASML. Since the invasion of Ukraine and subsequent economic sanctions, Western companies no longer supply advanced technology to Russia. Russia is on its own, and that is not going smoothly .
11.3 nm
Russia has developed a plan to produce its own lithography machine that is cheaper and simpler than ASML’s machines. The Russian approach focuses on using an alternative technology with a wavelength of 11.2 nanometers, rather than the industry standard 13.5 nanometers used by ASML.
This could improve resolution by 20 percent and reduce the cost of production parts, such as mirrors and lenses, according to the researchers. In addition, it is proposed to replace the current tin source with a xenon source. This change would drastically reduce the wear of optical elements and extend the life of critical components.
The switch to 11.2 nanometers does mean that an entirely new ecosystem would have to be set up around the standard. The machine’s production capacity would also be a lot lower, although the machine appears to be primarily intended for domestic production. There is talk of exports, but that will only be for a select market not served by traditional chip makers.
Ambitious, but unrealistic
The “dynamic” plan will be divided into three phases. The first phase will focus on research and development, including prototype testing. The second phase will build an experimental lithography machine for test production with 200- or 300-mm wafers. The final third phase involves the production of fully operational machines for commercial purposes.
Timings are not discussed. The context in which the plan must be implemented does not make it easy. Available R&D budgets are limited and import restrictions complicate access to parts. Moreover, an ecosystem around an entirely new standard must be established. It seems unlikely to us that Russia will be able to eliminate its technological backlog overnight.
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